Maglev Vacuum Pump

  • Detail
  • Parameters
Flow rate Q
50~1200m³/min
Single motor power of the moto
75~1000kW
Advantages
High efficiency, low noise, no need for lubricating oil or circulating water
Pressure range
Vacuum degree 10~70kPa.
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The Maglev Vacuum Pump is an innovative vacuum - generating device. Maglev technology allows the rotor to run at high speed without mechanical contact, reducing friction, energy consumption, and component wear, while extending service life. It operates with low noise and vibration, stably achieving high vacuum. It's much more energy - efficient than traditional vacuum pumps, widely used in semiconductor manufacturing, scientific research, optical coating, etc.

Parameters
ModelVacuum Degree(kPa)Air Volume Range(m³/min)Power(kW)
CX7510~7090~5075
CX100120~65100
CX200250~130200
CX300360~185300
CX400460~240400
CX600730~380600
CX10001200~6001000